Gold nanoparticles (AuNPs) were deposited by DC-magnetron sputtering onto molybdenum trioxide (MoO3) thin films grown by Photochemical Metal- Organic Deposition (PMOD) on Si(100) and borosilicate glass substrates. The chemical, optical and morphology properties of the films were studied by UV/ Vis Spectroscopy, Scanning Electron Microscopy (SEM), X-Ray Photoelectron Spectroscopy (XPS), and X-Ray Diffraction (XRD). SEM revealed that AuNPs formed after 5 s of sputtering. AuNPs are spherical and have both an average diameter of 18 nm and a relatively narrow size distribution. As the deposition time increases, larger structures are formed by an aggregation of AuNPs. XPS studies of the AuNP/MoO3 films on Si(100) showed the presence of Mo(VI) and Mo(V), which indicated that the films were primarily non-stoichiometric molybdenum oxides. The occurrence of oxygen vacancies in the substrate play an important role to stabilize the AuNPs.